BROOKS CTI ON BOARD IS 250FX CRYOPUMP P/N: 8185311G001R

Description: New BROOKS EDWARDS CTI ON BOARD IS 250FX CRYOPUMP P/N: 8185311G001R The harsh environment of ion implant processes requires consistent vacuum pumping that maximizes tool availability and product yield. Hydrogen gas is one of the main byproducts of the ion implantation process and can cause detrimental effects on both product yield and tool throughput. The On-Board® IS 250FX cryopump systems are designed to deliver the highest hydrogen vacuum pumping speed possible, thus opposing the possible impact on tool throughput. Our breakthrough technology uses Edwards’ extensive cryogenic pump design capability, enabling these cryopumps to outperform all other comparably sized pumps and still meet our rigorous safety guidelines. Edwards’ On-Board® On-Board® IS 250FX cryopump systems use intelligent system controls to deliver better process quality, vacuum consistency and uptime. Intelligent system controls allow for real-time system knowledge for managing motor speed and cryogenic temperature. The On-Board® IS system automatically adjusts for changing heat/gas loading conditions, resulting in enhanced vacuum consistency and improved inter-wafer recovery time. In addition, On-Board® IS cryopumps adjust for accumulation of process-related coatings with no compromise in reliability and productivity. The On-Board® IS system ensures full use of system level helium resources for any operational condition. This results in a substantial reduction in cost of ownership due to continuous optimization of helium allocation per pump, thus increasing the pump-to-compressor ratio. Lower power and cooling water consumption can be achieved with our On-Board® IS cryopump systems. On-Board® IS cryopumps for implant include proprietary regeneration sequences that optimize regeneration time and allow longer run times between regeneration. The very nature of this regeneration programmer considerably reduces the impact of ion implant residuals in the pump, providing longer pump life. The IntelliPurge power management routine reduces unexpected pump regeneration due to short-term power failure, while ensuring safety should power remain off for an extended period of time. To reduce system cost and increase ease of use the On-Board® IS cryopump system includes an integrated TC gauge and controller for a gate valve, eliminating the need for additional controllers. In addition, integrated rough, purge, vent valves and controls are included, increasing serviceability and system reliability Features and benefits: Specifically designed for ion implant applications Optimized for tool throughput - improved hydrogen pumping speed - Meets existing safety guidelines Intelligent Self-Adjusting technology - Automatic cryogenic heat load compensation - Variable speed motor and control system with reduced vibration Lower cost of ownership - More pumps per compressor - Energy savings with no compromise in productivity Variable speed motor maximizes pump operational life Increased uptime - IntelliPurge power failure pump management Physical Features Gas Pumping Speeds Water 6,500 L/Sec Air 2,200 L/Sec Hydrogen 7,400 L/Sec Argon 1,800 L/Sec Gas Capacities Hydrogen 32 L Typical Regeneration Times (includes 20 min. extended purge time) Full (First and Second Stage) 115 Minutes FastRegen (Second Stage only) 50 Minutes Vacuum Flange Inner Diameter 10 inches (250 mm) Features for On-Board® IS 250FX Integrated Controls / Integrated Accessories Pump-mounted, First and Second Stage Field-replaceable Temperature Sensors Module Motor Drive First and Second Stage Electronics Heaters Host Computer Interface Purge Valve (RS-232C, DB-9 Connector) Roughing Valve First Stage Temperature Control Vacuum (TC) Gauge Helium Management Pressure Relief Valve Service Communications Exhaust Purge Valve Port Remote Display Option IntelliPurge System (USB connector)

Price: 16999.99 USD

Location: Seabrook, New Hampshire

End Time: 2025-01-05T17:38:58.000Z

Shipping Cost: N/A USD